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| Want this Instrument? | Model: | FEI/Micrion 9100 |
| Contact Us Today | Type: | Focused Ion Beam |
| Year MFG: | 1996 | |
| Back to the instrument list | OEM Service Contract: | Off |
| Warranty: | Optional | |
| Installation: | Optional | |
| Price: | $150,000, GAE gas box $25,000 | |
| Comments: | Currently in crates |
| Description | |||
|
Ion Beam Data: |
Ga, 30kV, 10nm , 11nA | ||
|
Specimen Stage: |
200mm, 5 Axis | ||
|
Detectors: |
MCP (multi Channel Plate) | ||
|
Computer/Software: |
RS 6000, AIX ver 4.o OS, Microsurgery 1.6.4 | ||
| Data Recording: | Network card and video printer | ||
| Gas: | Metal deposition, Optional GAE gas box for insulator deposition, insulator etch and metal etch | ||
|
Vacuum System: |
Turbo with mechanical RP | ||
| Other components: |