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Want this Instrument? Model: Micrion 2100
Contact Us Today Type: Focused Ion Beam
Year MFG: 1995
Back to the instrument list OEM Service Contract: Off
Warranty: Optional
Installation: Optional
Price: $125,000, GAE gas box $15,000
Comments: Will be refurbed:

Description

Ion Beam Data:

 Ga, 30kV, 10nm, 11 nA

Specimen Stage:

150mm,  5 axis

Detectors:

Micro channel plate - sec and ion

Computer/Software:

RISC 6000, AIX 4.0 OS, Microsurgery 1.8.6
Data Recording: Network Card and video printer
Gas: Metal deposition, Optional GAE gas box for insulator deposition, insulator etch and metal etch

Vacuum System:

Turbo with mechanical RP

Other components: