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Want this Instrument? Model: FEI 830 DualBeam #1
Contact Us Today Type: DualBeam (SEM/FIB)
Year MFG: 1998
Back to the instrument list OEM Service Contract: Off
Warranty: Optional
Installation: Optional
Price: $750,000
Comments:  

Description
Beam Data:
- Electron Column
  • 3nm at 1kV, ~15mm WD
  • Schottky field emission electron column
  • 0.5-30kV
- Ion Column

  • 7nm at 30kV, ~17mm WD,

  • Ga LMIS, Magnum ion column

  • 22nA current

  • 10-30kV
Specimen Stage:
  • 200mm 5 axis motorized, computerized eucentric tilt stage
  • 200mm Load Lock for wafers and pieces 
Detectors:
  • E-Beam :In-lens Sec and Bse
  • I-Beam: CDEM
Computer/Software
  • Pentium PC,
  • Win NT OS
  • FEI xp 2.25
Gas:
  • Metal Deposition GIS
  • Metal Etch GIS
Other components:
  • TEAM video printer
  • Leader Monitor
  • Keithley Pico Amp Meter
  • EDAX
Vacuum System:
  • Turbo Chamber Vacuum, Dry rough pump