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Want this Instrument? Model: FEI 820 DualBeam #5
Contact Us Today Type: DualBeam (SEM/FIB)
Year MFG: 1996
Back to the instrument list OEM Service Contract: 1996 to 2006
Warranty: Optional
Installation: Optional
Price: $350,000
Comments:  Will be refurbed:

Description
Beam Data:
- Electron Column
  • Schottky FEG Electron Source
  • 0-30kV Accelerating Voltage
  • 7nm @1kV Resolution
- Ion Column

  • Ga LMIS Ion Source

  • 30kV Accelerating Voltage

  • 7nm @30kV / 11nA Resolution
Specimen Stage:
  • xy - 205mm x 205mm
  • z - 25mm
  • t - 0° to 52°
  • r - 360°
  • Access - 200mm load lock for wafers and pieces
Detectors:
  • CDEM, E/T
Computer/Software
  • PC
  • Windows NT
  • MCNT
Gas:
  • Platinum Metal Dep
  • Iodine Insulator Dep
Other components:
  • Optical Microscope
  • Noran EDX
Vacuum System:
  • Ion Column
  • Turbo Chamber
  • Mechanical Rough