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| Want this Instrument? | Model: | Phi Auger 680 |
| Contact Us Today | Type: | Scanning Auger Electron Microscope |
| Year MFG: | 1997 | |
| Back to the instrument list | OEM Service Contract: | Off |
| Warranty: | Optional | |
| Installation: | Optional | |
| Price: | $475,000 | |
| Comments: |
| Description | |||
|
Electron Beam Data: |
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| Electron Source: | Schottky FEG | ||
| Accelerating Voltage: | 25kV | ||
| Resolution: | 10nm | ||
| Magnification: | 45x to 500kX | ||
|
AES Performance: |
Cu LMM Auger Peak at 914eV | ||
| 1.0nA/20kV: | 13nm | ||
| 1.0nA/3kV: | 65nm | ||
|
Specimen Stage: |
All axis motorized | ||
| x,y: | 25mm x 25mm | ||
| z: | +5mm to -15mm | ||
| t: | 0º to 60º | ||
| r: | 360º | ||
| Access: | UHV magnetically coupled manual load lock | ||
| Detectors: | CMS, 8 channel cylindrical mirror analyzer | ||
| Computer/Software: | |||
| Computer: | Pentium | ||
| Operating System: | NT | ||
| Software: | PC-ACCESS, MultiPak | ||
| Data Recording: | |||
| Vacuum System: | UHV | ||
| Gun: | ion pump with titanium sublimator | ||
| Chamber: | Turbo | ||
| Rough: | Mechanical | ||
|
Other: |
Argon Ion Sputter Gun |